At Infineon Austria AG, Villach hydrogen is used in the semiconductor production process, as a carrier gas for silicium precursors such as trichlorsilane for the deposition of epitactical layers. After layer deposition, hydrogen emitted highly diluted into the atmosphere. Strict requirements on the purity of the hydrogen (8.0 or 99,999999 Vol%) and at the same time large demands are extremely challenging in terms of quality management, procurement and reliable logistics. The present situation of hydrogen supply is the delivery of liquefied hydrogen, produced from fossil resources, by fuel trucks from Leuna (Germany) or Rozenburg (Netherlands), two of only three sources of liquefied hydrogen supply in Europe. Since growing production capacities are expected due to the introduction of new products and technologies to the market in the next years, a significant increase in demand for highly pure hydrogen at IFAT is expected. Therefore, the current supply concept reaches its capacity limit and alternatives are evaluated.

The overarching goal of H2Pioneer is to establish an onsite-production of hydrogen to meet the expected increasing demand of the semiconductor industry. Hydrogen will be produced round the clock (7/24) in highest quality according to the economic and ecological requirements of „green industry“. The first innovation is the implementation of the onsite PEM electrolysis plant and the purification process to ensure 8.0 quality of hydrogen. The second substantial innovation is the conception and evaluation of reutilization strategies of the exhaust hydrogen, at present disposed of as waste, within a “green hydrogen cycle” (recycling, back to process or energetic use).